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[Objective] This study undertakes a comprehensive investigation of the phase modulation properties of subwavelength dielectric gratings(SWDGs), emphasizing the role of key structural parameters—namely, grating period, duty cycle, substrate refractive index, and grating height—in determining the resulting phase retardation. This research aims to demonstrate that SWDGs function as highly tunable optical elements that enable precise two-dimensional light-field manipulation, thereby offering distinct advantages over conventional birefringent waveplates in terms of angular stability, broadband performance, and integration flexibility. Ultimately, this study seeks to establish theoretical and experimental frameworks to support the implementation of SWDGs in advanced photonic platforms, including metasurfaces, polarization control devices, and integrated optical systems. [Methods] A dual approach was employed, integrating numerical simulations and experimental measurements. The finite element method(FEM) was employed in COMSOL Multiphysics to develop a rigorous electromagnetic model of the SWDG, enabling the simulation of phase retardation under variable structural parameters and incident conditions. The behavior of TE-and TM-polarized waves, their transmission efficiency, and the resulting phase difference were the specific focus of the simulations. In the experimental phase, a quartz-based subwavelength grating with a period of approximately 826 nm and a height of 1 280 nm was fabricated via ultraviolet nanoimprint lithography. A bespoke optical configuration was engineered to assess the phase retardation characteristics at 1 550 nm under normal incidence. The system employed Mueller matrix polarimetry, using a laser source, linear polarizers, and a rotating analyzer, in conjunction with a power meter. The resulting intensity profiles as a function of analyzer angle were recorded and fitted using MATLAB to extract the exact phase delay and optical axis orientation. [Results] The phase retardation is principally dictated by the grating height and the substrate's refractive index. An approximate linear relationship with height is observed, with a monotonic increase at higher refractive indices. The impact of variations in grating period on phase delay was found to be minimal, whereas the duty cycle showed a nonlinear effect, with an optimal value of approximately 0.4. The experimental measurements corroborated the numerical predictions, yielding a phase retardation of 0.44 rad, which closely matched the simulated value of 0.43 rad, resulting in a minor error of only 2.3%. The optical axis orientation was approximately 1.71 rad. The minor discrepancies observed between the simulation and the experiment were attributed to three factors: fabrication imperfections, slight misalignments in the optical path, and non-ideal polarization elements. The SWDG exhibited high transmission and consistent performance across a range of incident angles, thereby underscoring its robustness and suitability for practical applications. [Conclusions] This study successfully illustrates that SWDGs can be designed and fabricated to achieve tailored phase retardation. This offers a versatile and efficient alternative to conventional waveplates. The strong correlation between simulation and experimental results validates the use of FEM-based modeling for the design and optimization of SWDGs. Notable advantages of these gratings include broad angular acceptance, wavelength flexibility, and compatibility with standard nanofabrication processes. These characteristics render them highly promising for applications in metasurfaces, adaptive optics, optical sensing, and on-chip photonic systems. Subsequent research endeavors should explore dynamic and reconfigurable grating designs, as well as their integration with other functional optical elements to further expand their utility in next-generation optical technologies.
[1]PARK S, HEO S W, LEE W, et al. Self-powered ultra-flexible electronics via nano-grating-patterned organic photovoltaics[J].Nature, 2018, 561(7724):516–521.
[2]杨江涛,王健安,王银,等.亚波长金属光栅偏振器制备技术研究[J].红外技术, 2021, 43(1):8–12.YANG J T, WANG J A, WANG Y, et al. Fabrication technology of a subwavelength metal grating polarizer[J]. Infrared Technology, 2021, 43(1):8–12.(in Chinese)
[3]叶超,周钰聪,占春连,等.不同构型超表面偏振检测[J].光学学报, 2024, 44(14):258–266.YE C, ZHOU Y C, ZHAN C L, et al. Polarization detection of metasurfaces with different configurations[J]. Acta Optica Sinica, 2024, 44(14):258–266.(in Chinese)
[4]潘德彬,郭劼,杨晓燕,等.基于相位延迟器和双折射棱镜的光学相控阵设计及验证[J].光学与光电技术, 2020, 18(3):10–16.PAN D B, GUO J, YANG X Y, et al. Design and validation of the optical phased array by using half-wave LC retrader and birefringent prism[J]. Optics&Optoelectronic Technology,2020, 18(3):10–16.(in Chinese)
[5]王健,吴爱华,邓勇.激光回馈双折射测量系统稳定性能优化[J].激光与光电子学进展, 2023, 60(17):191–195.WANG J, WU A H, DENG Y. Stability optimization of laser feedback birefringence measurement system[J]. Laser&Optoelectronics Progress, 2023,60(17):191–195.(in Chinese)
[6]HSIEH C F, YANG C S, SHIH F C, et al. Liquid-crystal-based magnetically tunable terahertz achromatic quarter-wave plate[J].Optics Express, 2019, 27(7):9933–9940.
[7]MANTHALKAR A, NAPE I, BORDBAR N T, et al. All-digital stokes polarimetry with a digital micromirror device[J]. Optics Letters, 2020, 45(8):2319–2322.
[8]JOSEPH S, SARKAR S, KHAN S, et al. Exploring the optical bound state in the continuum in a dielectric grating coupled plasmonic hybrid system[J]. Advanced Optical Materials, 2021,9(8):2001895.
[9]ROYER F, VARGHESE B, GAMET E, et al. Enhanceme-nt of both faraday and kerr effects with an all-dielectric grating based on a magneto-optical nanocomposite material[J]. ACS Omega,2020, 5(6):2886–2892.
[10]VORONOV A A, KARKI D, IGNATYEVA D O, et al.Magneto-optics of subwavelength all-dielectric gratings[J].Optics Express, 2020, 28(12):17988–17996.
[11]KAZANSKIY N L, BUTT M A, KHONINA S N. Silicon photonic devices realized on refractive index engineered subwavelength grating waveguides-A review[J]. Optics&Laser Technology, 2021, 138:106863.
[12]LUQUE-GONZÁLEZ J M, SÁNCHEZ-POSTIGO A, HADIJELHOUATI A, et al. A review of silicon subwavelength gratings:Building break-through devices with anisotropic metamaterials[J]. Nanophotonics, 2021, 10(11):2765–2797.
[13]NAYAK J K, ROY CHAUDHURI P R, RATHA S, et al. A comprehensive review on effective medium theories to find effective dielectric constant of composites[J]. Journal of Electromagnetic Waves and Applications, 2023, 37(2):282–322.
[14]王柯威,肖康,孙静,等.基于严格耦合波理论的亚波长光栅合成孔径成像分析[J].中国激光, 2022, 49(24):29–38.WANG K W, XIAO K, SUN J, et al. Synthetic aperture imaging analysis of sub-wavelength grating based on rigorous coupledwave analysis method[J]. Chinese Journal of Lasers, 2022,49(24):29–38.(in Chinese)
[15]DHATT G, LEFRANÇOIS E, TOUZOT G. Finite element method[M]. Hoboken, NJ:John Wiley&Sons, 2012.
[16]IQBAL T, MARYAM I, MASOOD A, et al. Theoretical study of excitation of surface plasmon polaritons using silver metal[J].Plasmonics, 2022, 17(5):1857–1867.
[17]XU H N, DAI D X, SHI Y C. Anisotropic metamaterial-assisted all-silicon polarizer with 415-nm bandwidth[J]. Photonics Research, 2019, 7(12):1432–1439.
[18]NOVIKOV D S, KISELEV V G. Effective medium theory of a diffusion-weighted signal[J]. NMR in Biomedicine, 2010,23(7):682–697.
[19]BADRI S H, FARKOUSH S G. Subwavelength grating waveguide filter based on cladding modulation with a phase-change material grating[J]. Applied Optics, 2021, 60(10):2803–2810.
[20]何恩兴,陈友华,谢舜宇,等.基于互相关的-电光调制器相位标定方法[J].光学学报, 2023, 43(23):82–88.HE E X, CHEN Y H, XIE S Y, et al. Phase calibration method of electro-optic modulator based on cross-correlation[J]. Acta Optica Sinica, 2023, 43(23):82–88.(in Chinese)
[21]陈强华,邵多,刘福铭,等.基于等效元件和相位补偿法的双倍分辨率波片测量[J].中国激光, 2024, 51(8):94–99.CHEN Q H, SHAO D, LIU F M, et al. Double-Resolution Wave Plate Measurement Based on EquivalentComponents and Phase Compensation[J]. Chinese Journal of Lasers, 2024, 51(8):94–99.(in Chinese)
[22]FOMIRYAKOV E, KHARASOV D, NIKITIN S, et al. New approach to laser characterization using delayed self-heterodyne interferometry[J]. Journal of Lightwave Technology, 2021,39(15):5191–5196.
[23]GIL J J, OSSIKOVSKI R, GIL J J. Polarized light and the Mueller matrix approach[M]. Boca Raton,FL:CRC Press, 2022.
Basic Information:
DOI:10.16791/j.cnki.sjg.2026.02.008
China Classification Code:O43-33
Citation Information:
[1]XU Canhua,MAO Mengyao,XUE Kongsong ,et al.Theory and experimental research on subwavelength dielectric gratings[J].Experimental Technology and Management,2026,43(02):66-73.DOI:10.16791/j.cnki.sjg.2026.02.008.
Fund Information:
福建省自然科学基金(2023J01396,2022J01546)
2025-08-06
2025
2025-09-28
2025
2025-09-04
1
2026-02-26
2026-02-26
2026-02-26